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Zoom System for Coherent Imaging with No Moving Lens Group

Tuesday, February 25, 2025
Zygo Corporation

Current variable image magnification methods present problematic issues for high precision metrology instruments. This paper describes a novel approach to providing variable system magnification while avoiding those shortcomings. An optical zoom generally has multiple lens groups moving in concert to simultaneously adjust the effective focal length and maintain focus. Inevitably, the motion of the elements results in image drift and small variations in focus over the zoom range. An alternate approach using turreted fixed focal length lenses can have higher image quality but still suffers from image drift unless great care is taken in alignment of the individual lenses.

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