A Novel Measurement System to Aid Polished Optical Surface Manufacturing When Working with Coated Surfaces

Author: Joe Armstrong and Lisa Kadner
Tuesday, November 3, 2020
Polytec Inc.

Topography becomes more important in quality assurance for manufacturing. This regards the characterization of macro-sized to medium optics and the optimization of a manufacturing process using a coherence scanning interferometer, e.g., the measurement of touch points that directly relate to the polishing process and how to better optimize the manufacturing. Profiles or simple flatness measurements are not sufficient and areal measurements by line profiler or microscope-based systems are time consuming. Quality assurance in manufacturing is cost sensitive, especially, when a 100% control and optimization is needed. A macro lens optical metrology tool can overcome these disadvantages. We investigated the use of a large area coherence scanning interferometer for manufacturing, including measurements. Depending on the tolerances of parameter and the given cycle-time, solutions are presented on how to provide important measurement feedback to the manufacturing process.