Piezo Wafer Stage
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
AUBURN, Mass., July 24, 2024 — The 4-DOF module from PI is a wafer inspection solution that can correct for rotational wafer misalignment while taking wafer thickness and machine static characteristics into account. Based on a hybrid kinematics design the module combines Piezo-Walk® motors and piezo stacks to achieve both long travel and highly dynamic motion. The 4-DOF module features a high-stiffness design that provides fast step and settle better than 10 ms and position stability better than 0.05 µrad.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: July 2024
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