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Stanford Research Systems - Precision DC Voltage 3-25 728x90

Photoresist Flood Exposure Tool

EUV TechRequest Info

Photoresist Flood Exposure Tool. Courtesy of EUV Tech.

FALCON Photoresist Flood Exposure Tool from EUV Tech is an EUV resist characterization and diagnostics tool for photoresist manufacturing. FALCON’s platform has an array of in-situ analysis and process modules, including Fourier transform infrared spectroscopy, atomic mass spectrometry, total electron yield, photo-electron spectroscopy, an environmental and vacuum bake module with additional diagnostics, and a scanner-environment exposure module. It has an exposure spot size of 6 mm, supporting high-sensitivity chemical analysis and over 1,000 exposures for a 300-mm wafer in a single recipe run.

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Published: June 2025

There are 317 suppliers of Spectroscopy in the Photonics Marketplace.

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