- Company: Prior Scientific Instruments Ltd.
- Type: Nanopositioning Stage
- Applications: Nanopositioning, Microscopy
- X-Axis Travel Length: 100µm
- Y-Axis Travel Length: 100µm
- Stage Type: Motorized
The NPS-XY-100 is a piezo scanned flexure guided stage with integrated capacitance position sensors and is capable of subnanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 µrad over the full 100 µm range.
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