Mechanical-Bearing Stage
Aerotech, Inc. Aerotech’s PlanarDLA integrated, low-profile XY linear-motor stages with clear aperture feature high dynamics and exceptional geometric performance with straightness to ±500 nm, ±1.25-µm flatness, 5-µrad orthogonality, accuracy to ±400 nm, speeds to 2.0 m/s and accelerations to 2 g. Request Info
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