Advanced Motion Control for Semiconductor Metrology
Tue, Nov 18, 2025 1:00 PM - 2:00 PM EST
Explore how advanced motion control technologies are transforming semiconductor inspection and metrology. This session examines precision motion systems used in wafer inspection, SWLI, SEM/FIB, AFM, and reticle or mask inspection, highlighting how error motions impact performance and how system-level optimization, environmental control, and advanced algorithms achieve nanometer-level precision and maximum throughput. Presented by Aerotech.
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