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vacuum pumps x
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backstreaming
The term used in reference to vacuum systems using oil and diffusion pumps, describes the migration of pump fluids and their decomposition products into the vacuum chamber.
bakeout
The elimination of gases from the surfaces of a vacuum system by heating the surfaces when the pumping phase is occurring.
chemical vapor deposition equipment
Chemical vapor deposition (CVD) equipment refers to a class of specialized apparatus used in the process of chemical vapor deposition, a technique for depositing thin films of various materials onto...
cryopump
A vacuum pump in which pressure is reduced by condensing gases on surfaces cryogenically cooled to about 20 K (liquid hydrogen) or 4 K (liquid helium).
diffusion pump
A vacuum pump in which heated oil or another substance is forced through jets as a vapor that collides with gas molecules and carries them away from the chamber being evacuated.
epitaxial equipment
Epitaxial equipment refers to a set of specialized tools and systems used in the process of epitaxy, which is the growth of crystalline layers on a substrate material. Epitaxial growth is a critical...
evaporation coating
Coating carried out in a sealed chamber evacuated by a mechanical pump in series with an oil diffusion pump to a pressure less than 10-4 mm of mercury, measured by a vacuum gauge. At such a low...
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