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17 terms

Photonics Dictionary

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argon-fluoride excimer laser
An argon-fluoride (ArF) excimer laser is a type of ultraviolet laser that operates using a mixture of argon and fluorine gases. Excimer lasers are a class of gas lasers that emit light in the UV...
beam shaper
A beam shaper is an optical device or system designed to modify the spatial profile or intensity distribution of a laser or light beam. The goal is to transform the incoming beam into a desired shape...
binary optics
Optical elements, often created by micromachining, lithography or vacuum deposition, that rely on diffraction of the collected energy as opposed to the more common refracting or reflecting optics....
deep-ultraviolet laser
A deep-ultraviolet (DUV) laser is a type of laser that emits light in the deep ultraviolet region of the electromagnetic spectrum, typically with wavelengths ranging from about 200 nm down to 10 nm....
diffractive optics
Optical elements that use diffraction to control wavefronts. Diffractive optical elements include diffraction gratings, surface-relief diffractive lenses, holographic optical elements and...
electron-beam lithography system
An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...
fused quartz and silica
Fused quartz and silica are closely related materials, both composed primarily of silicon dioxide (SiO2), but they are produced through different manufacturing processes and have distinct properties...
lattice
In photonics, a lattice refers to a periodic arrangement of optical elements or structures, often on a microscopic or nanoscopic scale. These optical lattices can be created using various techniques...
micro-optics
Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level. These components are miniaturized optical elements that manipulate light at a...
nanopositioning
Nanopositioning refers to the precise and controlled movement or manipulation of objects or components at the nanometer scale. This technology enables the positioning of objects with extremely high...
phase mask
In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...
photoemulsion
In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.
photomask
A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...
photonic crystals
Photonic crystals are artificial structures or materials designed to manipulate and control the flow of light in a manner analogous to how semiconductors control the flow of electrons. Photonic...
ultraviolet coatings
Ultraviolet (UV) coatings are specialized optical coatings designed to operate in the ultraviolet region of the electromagnetic spectrum, typically ranging from 10 nm to 400 nm. These coatings are...
vacuum
In optics, the term vacuum typically refers to a space devoid of matter, including air and other gases. However, in practical terms, achieving a perfect vacuum, where there is absolutely no matter...
Zerodur
Zerodur is a type of glass ceramic material known for its exceptional thermal and mechanical properties, particularly its low coefficient of thermal expansion (CTE) close to zero. It was developed by...
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