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18 terms
Photonics Dictionary
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microelectromechanical systems x
microelectromechanical systems
Microelectromechanical systems, or MEMS, refer to miniature devices or systems that integrate mechanical and electrical components at a microscale. These systems combine elements such as sensors,...
microelectromechanical systems
Refers to micron-size complex machines that have physical dimensions suitable for the fabrication of optical switches for use in state-of-the-art communications networks.
MEMS
->
microelectromechanical systems
Refers to micron-size complex machines that have physical dimensions suitable for the fabrication of optical switches for use in state-of-the-art communications networks.
accelerometer
An accelerometer is a sensor or transducer that measures the rate of change of velocity of an object, or in simpler terms, it measures acceleration. Accelerometers are widely used in various...
Casimir force
The Casimir force is a quantum phenomenon that results in an attractive force between two closely spaced uncharged conductive surfaces. This force arises from the quantum vacuum fluctuations of the...
electron-beam lithography system
An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...
gyroscopy
Gyroscopy refers to the principles and applications of gyroscopes, devices that measure or maintain orientation based on the principles of angular momentum. Gyroscopes are essential in various...
liquid crystal on silicon
Liquid crystal on silicon (LCoS) is a display technology that combines liquid crystal materials with silicon-based semiconductor technology to create high-resolution, high-quality images. LCoS...
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of...
masks for evaporation/deposition
In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...
MEMS
microelectromechanical systems
MEMS fiber optic switch
A MEMS fiber optic switch is a microelectromechanical system (MEMS) device designed to selectively route optical signals between multiple fiber optic channels. These switches utilize miniature...
micro-robotics
Micro-robotics refers to the field of robotics that involves the design, development, and application of miniature robotic systems, often at the microscale. These robots, commonly referred to as...
optical fiber optic switches
Optical fiber optic switches are devices used in optical fiber communication systems to selectively route optical signals from one input fiber to one or more output fibers. They play a crucial role...
photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...
photoresist
Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....
thin-film deposition
Thin-film deposition is a process used to deposit a thin layer of material onto a substrate surface, typically ranging from nanometers to micrometers in thickness. These thin films are utilized in...
wafer
In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the...
Photonics Dictionary
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