Photonics Dictionary

An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...

Epitaxial equipment refers to a set of specialized tools and systems used in the process of epitaxy, which is the growth of crystalline layers on a substrate material. Epitaxial growth is a critical...

Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which...

Gallium arsenide (GaAs) is a compound semiconductor material composed of gallium (Ga) and arsenic (As). It belongs to the III-V group of semiconductors and has a zincblende crystal structure. GaAs is...

Laser annealing is a process that involves using a laser beam to heat and modify the microstructure of a material, typically a thin film or surface layer, with the objective of improving its...

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....

Sapphire crystal refers to a transparent, single-crystal form of aluminum oxide (Al2O3) known as corundum. It is one of the hardest known materials, second only to diamond on the Mohs scale of...

A singulated die refers to an individual semiconductor chip that has been separated or singulated from a larger wafer. This term is commonly used in the semiconductor manufacturing industry. ...

A crystal, glass, or quartz slicing and cutting machine is a specialized piece of equipment used in the manufacturing process to precisely cut and slice materials such as crystals, glass, and quartz...

Spin coating is a widely used technique in the fabrication of thin films and coatings, particularly in microelectronics, optoelectronics, and nanotechnology. It involves depositing a liquid precursor...

Sputtering equipment is machinery used in the process of physical vapor deposition (PVD), specifically sputtering. Sputtering is a method of depositing thin films of material onto a substrate surface...

A substrate refers to a material or surface upon which another material or process is applied or deposited. In various fields, such as electronics, biology, chemistry, and manufacturing, the term...

A three-axis stage, also known as a three-axis positioning stage, is a precision mechanical device designed to control the position of an object in three perpendicular directions: typically X, Y, and...

In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the...