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10 terms
Photonics Dictionary
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electron-beam lithography x
electron-beam lithography system
An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...
additive manufacturing
Additive manufacturing (AM), also known as 3D printing, is a manufacturing process that involves creating three-dimensional objects by adding material layer by layer. This is in contrast to...
argon-fluoride excimer laser
An argon-fluoride (ArF) excimer laser is a type of ultraviolet laser that operates using a mixture of argon and fluorine gases. Excimer lasers are a class of gas lasers that emit light in the UV...
electron storage ring
An advanced magnetic device used in x-ray lithography to beam x-rays onto the surface of silicon wafers used for semiconductor circuits.
electron-gun system
An electron-gun system is an assembly used to generate and control a focused beam of electrons. Electron guns find applications in various fields, including cathode ray tubes (CRTs), electron...
lattice
In photonics, a lattice refers to a periodic arrangement of optical elements or structures, often on a microscopic or nanoscopic scale. These optical lattices can be created using various techniques...
masks for evaporation/deposition
In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...
micro-optics
Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level. These components are miniaturized optical elements that manipulate light at a...
microlithography
A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
photomask
A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...
Photonics Dictionary
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