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Microlithography Equipment

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BUSCH Microsystems GmbH
BUSCH Microsystems GmbH - Langenlonsheim, Germany
More than 25 years of experience in designing and manufacturing high precision motion stages up to providing turnkey system solutions for the semiconductor, 3D printing, and laser micromachining industries. Offers a number of optimized positioning systems, for example of granite or CFC, for maximum precision and dynamics.
Custom ManufacturerDesigner
EV Group (EVG) - St. Florian am Inn, Austria
FabExchange - Fremont, CA
Heidelberg Instruments Inc. - Torrance, CA
Heidelberg Instruments Mikrotechnik GmbH - Heidelberg, Germany
MICROTECH srl - Palermo, Italy
Nanoscribe GmbH & Co. KG - Eggenstein-Leopoldshafen, Germany
PacTec 2nd Source Inc. - Vancouver, WA
SEMTech Solutions Inc. - North Billerica, MA
SUSS MicroTec Inc. - Corona, CA
SUSS MicroTec SE - Garching, Germany
TCG The Cernera Group Inc. - Discovery Bay, CA
Vincent Associates - Rochester, NY
Vistec Electron Beam GmbH - Jena, Germany
Yield Engineering Systems (YES) - Fremont, CA
Glossary
  • microlithography A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
Microlithography Equipment Suppliersmicrolithography equipmentmicron size structuressub-micronsubmicronshort-wavelengthlight electron beamlasers


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