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Microlithography Equipment
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Heidelberg Instruments Inc.
- Torrance, CA
Glossary
microlithography
A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
Microlithography Equipment Suppliers
microlithography equipment
micron size structures
sub-micron
submicron
short-wavelength
light electron beam
lasers
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