Definition of optical emission spectroscopy

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Photonics Dictionary

optical emission spectroscopy: In dry etching, a method of characterizing the composition of solid materials such as metal. Atoms in the OES technique are excited by energy that comes from a spark formed between the sample and an electrode. This energy emits light, which can then be converted into a spectral signal. The intensity recorded at the peaks of this spectral signal produce accurate material composition analysis.

PI Physik Instrumente - Microscope Stages MR ROS 11/24

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