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OSI Optoelectronics - Custom Solutions LB 5/23

FilmTek 2000 PAR-SE Ellipsometry and Reflectometry

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Tuesday, September 9, 2025
Bruker Nano Surfaces

FilmTek 2000 PAR-SE measures film thickness and refractive index independently and with high resolution. It applies specialized non-contact optical techniques to collect multi-angle and multi-modal data, then uses patented data processing and modeling to return results within seconds, enabling real-time process control. FilmTek 2000 PAR-SE is ideal for automated inline measurement of patterned thin-film and multilayer film stacks used in complex device structures, including ONO film stacks, high-k and low-k materials, polycrystalline and amorphous Si, and SiGe.

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File: FilmTek_2000_PAR_SE_Ellipsometry_and_Reflectometry.pdf (7.45 MB)
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Brukerfilm thicknessFilmTekindex of refractionreflectometrysemiconductor: EllipsometryMulti-AngleCoefficient of Extinction
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