- Fused silica, silicon
- 8" wafer scale
- Binary, 8-level, 16-level
- 0.5 μm Minimum feature size
- < 70 nm overlay accuracy
- Diffraction efficiency up to 98 %
- 190 nm to 5 μm wavelength range
56 Zhangba 6th Rd.
High-Tech Zone
Xi'an, Shaanxi 710077
China
Phone: +86 29 8188 9945