- Company: MKS/Newport
- Type: Hexapod
- Applications: Biomedical/Medical, Industrial, Scientific Research, Nanopositioning, Microscopy, Metrology, Fiber Optic Alignment, Other
- Max. Load: 450kg
- Mass: 25kg
- Height: 395mm
- X-Axis Range: 155mm
- Y-Axis Range: 138mm
- Z-Axis Range: 79mm
- Max. Linear Speed: 9mm/s
- Max. Rotation Speed (degrees/s): 2.8
- Min. Incremental X Motion: 0.30 µm
- Min. Incremental Y Motion: 0.30 µm
- Min. Incremental Z Motion: 0.16 µm
- X Repeatability: ± 0.15 µm
- Y Repeatability: ± 0.15 µm
- Z Repeatability: ± 0.08 µm
High load single device with six independent axes of motion: X, Y, Z, pitch, roll, and yaw. Light and compact design, with high stiffness.
1791 Deere Ave.
PO Box 19607
Irvine, CA 92606
United States
Phone: +1 949-863-3144
Toll-free: +1 877-835-9620