Full company details
Prior Scientific Inc.
Sub. of Prior Scientific Instruments Ltd.
80 Reservoir Park Dr.
Rockland, MA 02370
United States
Phone: +1 781-878-8442
Fax: +1 781-878-8736
Toll-free: +1 800-877-2234
Wafer Z Stage
Photonics Spectra
Nov 2022
The WP-Z-120A Wafer Stage from Queensgate features ms response times and high bandwidth for positioning in high-throughput applications.
The wafer stage is designed to hold 300-mm wafers, features a load capacity of up to 8 kg, and is suitable for heavy wafer chucks. The stage incorporates capacitive positioning sensors to provide nm-displacement measurement and precision closed-loop feedback. Flexure guidance offers friction-free, reliable motion to >120 µm in closed-loop mode, achieving fast response and settle times with digital closed-loop controllers. Applications include wafer inspection, optical microscopy, and various other inspection techniques.
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