Search
Menu
Photonics SuppliersPiezoelectric Positioning Stages
Full company details
Prior Scientific Inc.
Sub. of Prior Scientific Instruments Ltd.
Map80 Reservoir Park Dr.
Rockland, MA 02370
United States
Phone: +1 781-878-8442
Fax: +1 781-878-8736
Toll-free: +1 800-877-2234

Wafer Z Stage

Photonics Spectra
Nov 2022
Wafer StageThe WP-Z-120A Wafer Stage from Queensgate features ms response times and high bandwidth for positioning in high-throughput applications.

The wafer stage is designed to hold 300-mm wafers, features a load capacity of up to 8 kg, and is suitable for heavy wafer chucks. The stage incorporates capacitive positioning sensors to provide nm-displacement measurement and precision closed-loop feedback. Flexure guidance offers friction-free, reliable motion to >120 µm in closed-loop mode, achieving fast response and settle times with digital closed-loop controllers. Applications include wafer inspection, optical microscopy, and various other inspection techniques.

More products
Request Info About This Product

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Prior Scientific Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.