Full company details
PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics
16 Albert Street
Auburn, MA 01501
United States
Phone: +1 508-832-3456
Fax: +1 508-832-0506
Granite-Based Wafer Stages
Photonics Spectra
Aug 2024PI’s granite-based multi-axis motion systems can be used for the automation of wafer metrology, glass substrate inspection, and lithography applications. Based on modular concepts, the stages are customizable with technologies including air bearings, rails-on-granite, direct drive motors, nanometer resolution encoders, and piezo drive systems. The granite-based systems can travel at ranges including a meter or more, depending on the configuration.
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