Full company details
PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics
16 Albert Street
Auburn, MA 01501
United States
Phone: +1 508-832-3456
Fax: +1 508-832-0506
Piezo Wafer Stage
Photonics.com
Jul 2024AUBURN, Mass., July 24, 2024 —
The 4-DOF module from PI is a wafer inspection solution that can correct for rotational wafer misalignment while taking wafer thickness and machine static characteristics into account. Based on a hybrid kinematics design the module combines Piezo-Walk
® motors and piezo stacks to achieve both long travel and highly dynamic motion. The 4-DOF module features a high-stiffness design that provides fast step and settle better than 10 ms and position stability better than 0.05 µrad.
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