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Photonics Suppliers Hexapods

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PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics

16 Albert Street
Auburn, MA 01501
United States

Phone: +1 508-832-3456

Fax: +1 508-832-0506

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Advances in Nanometer Precision Motion Control in Industry and Research

Author: Scott Jordan, Brian Lula, Stefan Vorndran Monday, April 20, 2020
1) High performance motion control is key for automation and alignment applications, found in semiconductor manufacturing, laser/materials processing, optical inspection, or additive manufacturing. High-speed synchronization, high throughput and reliability are no longer mutually exclusive with sub-µm accuracy.

2) Nanopositioning mechanisms aid progress in fields as diverse as genomics, photonics, defense, and semiconductors. The latest designs include hexapods, compact air bearings and piezo-motors.

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File: PI_Advances_in_Nanometer_Precision_Motio.pdf (1.46 MB)
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