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PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics

16 Albert Street
Auburn, MA 01501
United States

Phone: +1 508-832-3456

Fax: +1 508-832-0506

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Nanopositioning and Precision Motion Control: A Step Ahead

Author: Scott Jordan, Brian Lula and Stefan Vorndran Thursday, March 11, 2021
Nanopositioning mechanisms are key to progress in fields as diverse as materials science, genomics, photonics, defense, biophysics, and semiconductors. A nanopositioning mechanism is defined as a positioning device capable of nanometer or sub-nanometer resolution. There are several types of nanopositioners; the article covers several new designs, including miniature inertia motors, parallel kinematics, voice-coil drives, frictionless air bearing stages, and piezo-driven, flexure guided stages equipped with direct metrology feedback. The pace of innovation in recent years has been blistering.

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File: PI_Nanopositioning_whitepaper.pdf (518.22 KB)
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