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PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics

16 Albert Street
Auburn, MA 01501
United States

Phone: +1 508-832-3456

Fax: +1 508-832-0506

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Granite-Based Wafer Stages

Name: Granite-Based Wafer Stages
Brand: PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics

Photonics.com
Jun 2024AUBURN, Mass., June 11, 2024 — PI Granite-Based Wafer Stages

PI’s granite-based multi-axis motion systems can be used for the automation of wafer metrology, glass substrate inspection, and lithography applications. Based on modular concepts, the stages are customizable with technologies including air bearings, rails-on-granite, direct drive motors, nanometer resolution encoders, and piezo drive systems. The granite-based systems can travel at ranges including a meter or more, depending on the configuration.

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