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PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics

16 Albert Street
Auburn, MA 01501
United States

Phone: +1 508-832-3456

Fax: +1 508-832-0506

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Advances in Precision Motion Control and Mechanisms

Author: Matt Reck, Stefan Vorndran Thursday, September 5, 2019
Part I: Improving Stage Accuracy with ACS Dynamic Error Compensation

Even the best precision motion systems exhibit some amount of position error. These errors can be measured using external measurement devices, such as a laser interferometer, and can then be corrected. The ability to change the motion profile according to a preset correction map is called Dynamic Error Compensation and is a standard feature in all ACS SPiiPlus controllers used by PI.

Part II: Reliable Piezo Motion Devices for Industrial and Space Applications

Piezo mechanisms are used for high-speed, high precision applications. The latest generation has been tested to work 100 billion cycles without failure and performance loss and can operate even in exotic places such as the mars rover over years.

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File: Advances_in_Precision_Motion_Control_and_Mechanisms.pdf (1.44 MB)
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