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Oxford Instruments America Inc.
Member of the Oxford Instruments Group plc
Plasma Technology

Map300 Baker Ave., Ste. 150
Concord, MA 01742-2124
United States
Phone: +1 978-369-9933
Fax: +1 978-369-8287
Toll-free: +1 800-447-4717
Provides a range of high performance, flexible tools to semiconductor and electronic processing customers in both R&D and production for the precise, controllable, and repeatable etching, deposition and growth of micro- and nanostructures.
Established: 1986
Employees: 50
Ownership type: Publicly Traded Stock
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