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Oxford Instruments

300 Baker Ave., Suite 150
Concord, MA 01742
United States

Phone: +1 978-831-9948

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Atomic Layer Deposition System

Name: Atomic Layer Deposition System
Brand: Oxford Instruments

Photonics Spectra
Oct 2023

The PlasmaPro ASP high-rate atomic layer deposition (ALD) research system from Oxford Instruments is designed for quantum technology and advanced R&D.

The system features a patented remote plasma source design, optimized chamber geometry, and wafer stage bias for ion energy control, resulting in a fast atomic layer deposition rate, low resistivity, and high critical temperature superconducting nitride films. Its initial application focus is quantum technology.

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