In-line sputtering tools are used in a range of R&D and production formats for the silicon, emerging materials, precision optics, semiconductors, photomasks, telecom networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, FPD and RF power devices.
Established: 1986
Facility area (sq ft): 40,000
Ownership type: Privately Owned