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Photonics Suppliers Sputtering Equipment

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Intlvac Thin Film Corp.

1401 Duff Dr.
Suite 600
Fort Collins, CO 80524
United States

Phone: +1 970-305-8508

Toll-free: +1 800-959-5517

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Fabricating Low Loss GeO₂ Thin Films for Planar Waveguides Such as Photonic Integrated Circuits

Author: Yiorgio Mathioudakis Tuesday, September 1, 2020
High quality GeO₂ thin films that exhibit low loss and low surface roughness were produced by Intlvac’s Nanochrome IV PARMS system, proving that ion assisted AC dual sputtering is an effective fabrication technique. This is highly applicable to planar waveguides such as Photonic Integrated Circuits (PICs). PICs look to solidify themselves as the new foundation of next gen electronics and the time to push for innovation and investment in this technology is now.

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File: GeO2_Marketing_White_Paper.pdf (1.17 MB)
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Fabricating Low Loss GeO2 Thin Films for Planar Waveguides Such as Photonic Integrated Circuits

Fabricating Low Loss GeO₂ Thin Films for Planar Waveguides Such as Photonic Integrated Circuits