Full company details
Intlvac Thin Film Corp.
1401 Duff Dr.
Suite 600
Fort Collins, CO 80524
United States
Phone: +1 970-305-8508
Toll-free: +1 800-959-5517
Intlvac PARMS for Sputtered IR Films
Photonics Showcase
Apr 2024The Nanochrome IV PARMS produces dielectric thin film layers by reactive magnetron sputtering with final reaction and film densification at the substrate surface using a high current, low energy ion source. Reactive operation results in faster deposition times. Low pressure sputtering achieves higher deposition rates. Films are made reactively to produce highly dense, pure oxides and nitrides suitable for the UV, VIS NIR, SWIR and MWIR ranges.
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