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Line-Scan System

Vision Spectra
Winter 2022Chromasens GmbH has launched a machine vision system that detects cosmetic defects on silicon semiconductor wafers.

Based on line scan technology, the Chromasens system consists of Chromasens allPIXA evo 15K CxP4 mono cameras, Myutron XLS05 lenses, an XCL4 LED controller, and Corona II lighting with coaxial light modules for dark-field and bright-field illumination. The allPIXA evo 15K CxP4 mono camera is equipped with a trilinear CMOS line scan sensor delivering a maximum line length of 15,360 pixels. The allPIXA evo 15K CxP4 camera can trigger up to four different flash controller channels synchronized to its line acquisition using a multichannel LED flash. All types of nondirectional scratches on the wafer can be captured with dark-field illumination by getting high light intensity into deep grooves. Conversely, with bright-field illumination, the stains on the wafers are more apparent by diffuse light.More products