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Bruker Nano Surfaces
Div. of Bruker Corp.
5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States
Phone: +1 520-741-1044
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Characterization of Advanced Semiconductor Materials and Processes with Nanoscale IR Spectroscopy
Author: Stephen Hopkins
Wednesday, March 31, 2021
This application note demonstrates the successful application of Tapping AFM-IR to distinguish the chemical footprints of several nanoscale lithographic patterns consisting of complex molecular assemblies with excellent spatial resolution of 4 nm. Additionally, nanoscale IR spectroscopy also excels in the characterization of nanoscale defects.
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