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Bruker Nano Surfaces
Div. of Bruker Corp.

5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States

Phone: +1 520-741-1044

Fax: +1 520-294-1799

Toll-free: +1 800-873-9750

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Characterization of Advanced Semiconductor Materials and Processes with Nanoscale IR Spectroscopy

Author: Stephen Hopkins Wednesday, March 31, 2021
This application note demonstrates the successful application of Tapping AFM-IR to distinguish the chemical footprints of several nanoscale lithographic patterns consisting of complex molecular assemblies with excellent spatial resolution of 4 nm. Additionally, nanoscale IR spectroscopy also excels in the characterization of nanoscale defects.

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File: Characterization_of_Advanced_Semiconductor_Materials.pdf (3.49 MB)
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