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Bruker Nano Surfaces
Div. of Bruker Corp.

5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States

Phone: +1 520-741-1044

Fax: +1 520-294-1799

Toll-free: +1 800-873-9750

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FilmTek 4000 Robotic

FilmTek^™ 4000 is a fully automated, nondestructive optical property and thickness metrology tool specifically designed to address the demanding process control needs of silicon photonics, photonic integrated circuits, and planar waveguides. The system utilizes proprietary multi-angle reflectance technology, with beams specifically optimized for 50 nm to 150 μm films, to provide best-in-class index of refraction (n) resolution and repeatability. FilmTek 4000 uniquely enables precise real-time in-line monitoring of optical properties n and coefficient of extinction (k) — necessary when producing materials like BPSG, Ge-SiO2 , P-SiO2 , Si3N4 , SiON, and LiNbO3.

The FilmTek 4000 Robotic offers several unique capabilities and functionalities, including:

Ultimate Non-Contact Refractive Index Resolution
Enhanced Versatility for Single- and Multi-Layer Stacks
Fully Automated, High-Throughput In-Line Metrology

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