Thickness Measurements of Opaque and Transparent Films or Coatings with WLI

Author: Roger Posusta Monday, September 16, 2024
Accurate control over film thickness and uniformity is essential for throughput and performance in the automotive, aerospace, semiconductor, medical, and research industries. The modern standard for 3D, non-contact measurements of surface topography and texture is white light interferometry (WLI), also known as coherence scanning interferometry (CSI). It is the only method that provides film thickness, coating uniformity information, and roughness of both film and substrate over large areas, all in a single measurement that takes only a few seconds to obtain. This application note describes film thickness metrology with WLI, particularly through-film measurements of transparent thick and thin films and opaque film step measurements.

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