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Photonics Suppliers Nanopositioning Equipment

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Aerotech Inc.

101 Zeta Dr.
Pittsburgh, PA 15238
United States

Phone: +1 412-963-7470

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Estimating Combined Galvo and Servo Motion Accuracy

Thursday, January 6, 2022
To achieve global workpiece surface accuracy in motion control systems, the motion control architecture must be configured properly. For more advanced features, such as Infinite Field of View (IFOV), characterizing each element of the systemic errors can be very challenging. Complex systems have primary error contributors as well as secondary errors, which result from combining stages and galvanometers. This white paper details how to characterize the constituent error elements and suggests a means of predicting overall system errors for IFOV-enabled motion control platforms.

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File: Estimating_Combined_Galvo_and_Servo_Motion_Accuracy.pdf (1.11 MB)
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