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HVS Vacuum Sensor MEMS-Pirani
About Heimann Sensor GmbH- Type: Other
- Chip size HVS Vac03k: 4 mm^2
- Chip size HVS Vac04: 1mm^2
- p (HVS vac3k): 100- 1e-6 mbar
- p (HVS vac4): atm-1e-3 mbar
- package HVS Vac03k/04: TO-39
- package HVS Vac03k+04: TO-08
The HVS Series is our vacuum sensing series. These miniature pirani-type vacuum sensors allow measurements in a pressure range from 1000 mbar (atmospheric pressure) down to 10 -3 mbar (HVS 04), and 10 mbar down to 10 -5 mbar (HVS 03k).
They come in a small and robust TO-39 or TO-8 metal housing. Assembling the HVS 04 and HVS 03k in a TO-8 housing allows coverage of the full pressure range.
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