About HTA Photomask
A mask used to step and repeat an array of images creating another mask or wafer.
Reticles may have only one die or an array of die but don’t contain sufficient pattern dice to cover a wafer unless used in a step and repeat system. These reticles are usually at a larger scale such as a 2X, 4X, 5X and 10X but may also be at 1X.