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PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics

440 Hartford Turnpike
Shrewsbury, MA 01545
United States

Phone: +1 508-832-3456

Fax: +1 508-832-0506

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Six-Axis Piezo Stage

Name: Six-Axis Piezo Stage
Brand: PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
Rating: 5 (1 reviews)

Photonics Spectra
Jun 2025 PI 6-Axis Piezo Stage

The P-562.6CD from PI is a 6-axis nanopositioning stage for applications in photonics, semiconductor metrology, super-resolution microscopy, and nanomanufacturing. The operating principle of the stage is based on a parallel-kinematic design with only one moving platform for all six axes and is programmed with the company’s E-712 digital servo piezo controller. The P-562.6CD includes interfaces such as Ethernet, USB, SPI, RS-232, and analog, as well as supported functions including wave generating, data recording, auto zeroing, and trigger I/O.

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