Full company details
Bruker Nano Surfaces
Div. of Bruker Corp.
5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States
Phone: +1 520-741-1044
Fax: +1 520-294-1799
Toll-free: +1 800-873-9750
FilmTek 2000 PAR-SE Ellipsometry and Reflectometry
Tuesday, September 9, 2025
FilmTek 2000 PAR-SE measures film thickness and refractive index independently and with high resolution. It applies specialized non-contact optical techniques to collect multi-angle and multi-modal data, then uses patented data processing and modeling to return results within seconds, enabling real-time process control. FilmTek 2000 PAR-SE is ideal for automated inline measurement of patterned thin-film and multilayer film stacks used in complex device structures, including ONO film stacks, high-k and low-k materials, polycrystalline and amorphous Si, and SiGe.
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