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Bruker Nano Surfaces
Div. of Bruker Corp.
Map5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States
Phone: +1 520-741-1044
Fax: +1 520-294-1799
Toll-free: +1 800-873-9750

FilmTek 2000 PAR-SE Robotic

Photonics Showcase
Nov 2025
FilmTek 2000 PAR-SE RoboticThis best-in class system utilizes reflectometry and ellipsometry to provide high-resolution, independent measurements of film thickness and refractive index. Patented multi-modal data collection and modeling return precision results in seconds — ideal for inline metrology of ONO stacks, SiGe, high-k/low-k, and more in semiconductor, MEMS, and photonics manufacturing. Integrated software makes complex wafer analysis intuitive and reliable.

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