Trikon Announces Shipment of Plasma Etchers to Korea

NEWPORT, England, June 27 -- Trikon Technologies Inc., a maker of semiconductor production equipment, announced shipment of three Omega plasma etchers to the Iljin Corp. to be used for the manufacture of multimedia projector displays on quartz wafers.
Iljin has opened a new manufacturing facility in Pyongtaek City, Korea with a Japanese technology partner. In the first phase of development this facility will manufacture high aperture polysilicon thin-film transistor (TFT) panels for multimedia projectors. The Omega etchers will be used for critical processing steps, including the etching of aluminum interconnect, polysilicon gates and oxide contacts on 200 mm quartz wafers.
"This sale strengthens Trikon's presence in the Korean semiconductor equipment market," said W.S. Jee, general manager of Trikon Korea. "This order was won over significant competition from major US and Japanese etch vendors and represents our further technological expansion into a growing Asian market. Trikon products are already in use at a number of key Korean semiconductor facilities. Customers include major Korean DRAM manufacturers who have installed Trikon's Flowfill technology for both low k and standard dielectric deposition."