Screen Semiconductor Solutions Installs UV Laser Anneal Tool on CEA-Leti Campus

Screen Semiconductor Solutions Co. Ltd. and Grenoble, France-based research institute CEA-Leti have collaborated with the installation of a nanosecond-scale UV laser anneal LT-3100 system on Leti’s campus, to be delivered by Laser Systems and Solutions of Europe a subsidiary of Screen.

“The introduction of Screen’s nanosecond-scale UV laser anneal tool in Leti’s leading-edge, pre-industrial equipment infrastructure will open new innovation opportunities for current and future technology being developed on site,” said Marie Semeria, CEO of Leti. “With SOI, CoolCube and nanowire technologies development, we are facing increased challenges in developing new material property and ultra-thin-film modification with minimal thermal impact. Leveraging the LT-3100 system will enable solutions for technology breakthroughs that will eventually lead to the development of practical demonstrators for industry.”

The laser tool is expected to be fully operational in the first half of 2017 and will support multiple wafer size requirements to meet the different needs of Leti’s laboratories.

“Following a long history of successful joint developments with Leti, we are very excited by the opportunity to bring our laser technology to Leti’s ecosystem to support ‘More than Moore,’ IoT and future innovation technology requirements,” said Tadahiro Suhara, president of Screen Semiconductor Solutions. “In addition to the collaboration activities, we will use Leti’s state-of-the-art infrastructure to operate our Lasse European demo lab, giving our customers unprecedented demonstration infrastructure capability. We expect to showcase the innovation value that our nanosecond-scale UV laser-equipment technology and resources bring to advance semiconductor process development in multiple fields of research and development as supported by Leti.”

Screen is a specialized manufacturer in various areas such as wafer cleaning equipment, lithography equipment and thermal anneals. CEA-Leti is a research institute for electronics and information technologies, one of the world’s largest organizations for applied research in microelectronics and nanotechnology.