$5M Metrology Order
!%Rudolph Technologies Inc.%! of Flanders, N.J.,
a process characterization equipment and software provider, has received $5 million
worth of orders from a long-standing customer for its S3000A and MetaPulse III thin-film
metrology systems. Expected to ship to multiple fabs in the first half of 2010,
the systems will be used in copper metrology applications, including copper seed/barrier,
electrochemical deposition and chemical mechanical polishing. The MetaPulse III
can directly measure thickness and other metrology parameters on product wafers
in the active device regions for accurate process control.
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