University of Washington Buys E-Beam Tool

JEOL USA of Peabody, Mass., will install an e-beam direct-write-on-wafer lithography tool to support nanoscience research in the Pacific Northwest when the University of Washington takes delivery of a JBX-6300FS e-beam system. The new system is set be installed in the Washington Technology Center Microfabrication Lab. Funding was provided through a state-supported Star grant to Michael Hochberg, assistant professor of electrical engineering, and through a matching grant from the Washington Research Foundation. In addition to Hochberg's work in nanophotonics, the JEOL e-beam tool will support nanoscience research throughout the university and the region, in fields including bioengineering, nanoscale electronic and magnetic device research, materials science, chemical engineering, chemistry, mechanical engineering and physics. The tool will be available to students as well as researchers from several outside companies whose work includes MEMS research and production/process development.