Chip Maker Reorders Axcelis Implanter

Axcelis Technologies Inc. said today it has received a follow-on order for its Optima HD high-dose ion implanter from an unspecified memory device manufacturer. The system will ship during the second quarter of 2007. The Optima HD uses advanced spot-beam technology and in both conventional high-dose implants and for applications involving 45-nm technology, such as molecular and hydrogen implantation. Axcelis is based in Beverly, Mass.





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