Central Florida University, Powerlase Collaborate

Powerlase Ltd. of Crawley, UK, has partnered with the University of Central Florida in Orlando to further develop a high-power laser-produced plasma extreme-UV source. Their aim is to create high extreme-UV conversion efficiency and to eliminate neutral and charged particles. The British company has provided its kilo-class Starlase laser to irradiate the university’s tin-doped microdroplet laser plasma source. Extreme-UV lithography is used for producing semiconductors of 32-nm half-pitch and below.