BOC Edwards Wins $17M Samsung Order

BOC Edwards, a UK-based supplier of vacuum, abatement, chemical management equipment and services to semiconductor manufacturers, announced today it has received a $17 million order to supply vacuum equipment for Samsung Electronics Co. Ltd.'s eighth-generation TFT-LCD (thin-film transistor liquid-crystal display) fabrication plant in Tangjeong, South Korea. The order includes diHK pumping systems for harsh-duty PECVD (plasma-enhanced chemical vapor deposition) processes, diFK pumping systems for load-lock applications, and STP magnetically levitated turbomolecular pumps for plasma etch tools. Investment at Generation 8 (2.2m X 2.5m) is primarily aimed at supplying the large-area LCD TV market, which is expected to grow at an annual growth rate of 27 percent and reach a total of $16.9B by 2010, BOC Edwards said.