Ultratech plans to incorporate Electro-Damp II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology and optical networking applications.
Each patented Electro-Damp II system will include TMC’s DC-2000 digital controller, noncontacting electronic valving system, Gimbal Piston isolator and high-force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool.
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