Spectra-Physics

Built in response to the need in microelectronics and industrial manufacturing to process materials with smaller features, tighter tolerances and higher speeds, the Hippo (high-intensity peak-power oscillator) has a compact optical cavity that uses high-gain Nd:YVO₄ and that is end-pumped by two Prolite 40-W FCbar modules. This Q-switched device made by Spectra-Physics of Mountain View, Calif., produces short-pulsed, high-peak-power output at repetition rates that exceed 200 kHz for high-speed processing and throughput.

The company says the laser provides high beam quality (M²<1.2) and stability for improved process control and fine feature resolution. The <15-ns pulses enable materials processing with minimal heat-affected zone, which is critical for precision micromachining of delicate materials. The laser can be employed for drilling grooves and microvias and for dicing silicon wafers for the solar cell and microelectronics industries.

The laser's 1064-nm output can be frequency-doubled to 532 nm, -tripled to 355 nm and -quadrupled to 266 nm using prealigned harmonic modules that can be easily replaced or removed in the field. This benefits systems integrators by allowing them access to four wavelengths from a single system for optimal processing of different materials. The modules are designed for thousands of hours of operation, even in the deep-UV.